Mechanical loss of silicon nitride films grown by plasma-enhanced chemical vapor deposition (PECVD) method
- Document #:
- LIGO-G1300171-v1
- Document type:
- G - Presentations (eg Graphics)
Other Versions:
- Abstract:
- Preliminary report of the mechanical loss of the silicon nitride films were given.
- Files in Document:
-
- Mechanical loss of silicon nitride films grown by plas...pdf (file is not accessible)
- Other Files:
- USA conference of Silicon nitride 20130309.pdf (file is not accessible)
- Topics:
- Authors:
